Integrated detection device, in particular for detecting particles such. As particulate matter or alpha particles
2015
A detection device (100) is formed in a body (2) of semiconductor material having a first surface (2A) and a second surface (2B) and a cavity (4). A detection region (4A) is formed in the cavity, and an air pump (50) is integrated into the body and adapted to cause a forced air movement in the direction of the detection region. A detection system (5-8) of an optical type or an alpha particle detector is disposed at least in a part of the detection range.
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