Mount-induced transmitted wavefront distortion measurement of large slab matrix module

We present a transmitted wavefront measuring system of large optic modules based on Shack Hartmann wavefront sensor, aiming to perform optical metrology for rectangular laser slabs arranged in a 4-high by 1-wide matrix. This system is developed to perform high-accuracy measurement for extremely high quality optical components needed for inertial confinement fusion (ICF) facility with wavefront accuracy better than 0.4λ (peak to valley, λ=632.8nm). Sensitivity analysis is put forward to specified tolerances of components to ensure the built system will perform as desired. Experiments results showed that added wavefront of each slab of 32 matrix modules is controlled under 1λ successfully.