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Damage to shallow n + /p and p + /n junctions by CHF 3 +CO 2 reactive ion etching
Damage to shallow n + /p and p + /n junctions by CHF 3 +CO 2 reactive ion etching
1988
I.-W. Wu
R. A. Street
J.C Mikkelsen
Keywords:
Reactive-ion etching
Inorganic chemistry
Materials science
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