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Minimal Fab metal film thickness tester by total X-ray reflection fluorescence
Minimal Fab metal film thickness tester by total X-ray reflection fluorescence
2021
Kana Onishi
Hiroshi Nishizato
Tatsuya Hayashi
Wataru Sakai
Jun Hirose
Shuichi Noda
Hiroshige Kogayu
Sommawan Khumpuang
Shiro Hara
Keywords:
X-ray
Materials science
Fluorescence
Reflection (mathematics)
Metal
Optics
Correction
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