Old Web
English
Sign In
Acemap
>
Paper
>
Multilayer adsorption in reactions of oxidation and etching of semiconductors
Multilayer adsorption in reactions of oxidation and etching of semiconductors
1990
M. R. Baklanov
S. M. Repinskii
A. V. Rzhanov
Keywords:
Adsorption
Inorganic chemistry
Organic chemistry
Etching
Germanium
Semiconductor
Chemistry
Silicon
semiconductor materials
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]