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Pattern Formation Using Photoreactive Spin-Coated Film and its Application to Device Fabrication
Pattern Formation Using Photoreactive Spin-Coated Film and its Application to Device Fabrication
2013
Kato Hirosato
Tanaka Kuniaki
Usui Hiroaki
Keywords:
Photochemistry
Spin-½
Photopolymer
Optoelectronics
Materials science
OLED
Pattern formation
Fabrication
Correction
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