Mechanism and modelling of source/drain asymmetry variation in 65?nm CMOS devices for SRAM and logic applications

The source/drain asymmetry variation of 65 nm CMOS devices for SRAM and logic applications has been investigated in detail. For the first time, we observe that the asymmetry variation is proportional to the inverse of the root square of the device area. In other words, the asymmetry variation should become worse for future advanced CMOS technologies. Fortunately, through the T-CAD simulations and experiments, we find the variation can be improved significantly with the optimization of the poly-gate grain size, extra laser annealing and using a vertical profile poly-gate. Furthermore, the improvement in asymmetry variation leads to a better static noise margin of SRAM.