Characterization of the Low-Voltage, High-Current Single-Cell Ion Source

Advanced Energy has recently expanded the technology available for anode layer ion sources for industrial applications by introducing a round, single-cell ion source (Figure 1). The previously available technology included linear and round, multi-cell ion sources, the former for in-line coaters and the latter to process one substrate at a time. Similar to linear and multi-cell sources, the single-cell ion source can operate without external electron emitters and, therefore, is compatible with reactive gas environments. In particular, oxygen can be used as a working gas. The main advantage of the new single-cell ion source over the existing multi-cell source is its ability to deliver much higher ion currents at lower discharge voltages. This makes it especially appropriate for applications where high ion energy is a concern, such as hard disk manufacturing (disk cleaning and high-rate DLC deposition), ophthalmic, and optical applications.