In-situ spectroscopic ellipsometry for real time semiconductor growth monitor

Blaine D. Johs,Duane E. Meyer,Gerald T. Cooney,Huade D. Yao,Paul G. Snyder,John A. Woollam,J. L. Edwards,George N. Maracas

In-situ spectroscopic ellipsometry for real time semiconductor growth monitor

1993

Blaine D. Johs
Duane E. Meyer
Gerald T. Cooney
Huade D. Yao
Paul G. Snyder
John A. Woollam
J. L. Edwards
George N. Maracas

A modular spectroscopic ellipsometer for in situ and ex situ materials analysis is described, and results for in situ MBE growth of GaAs/AlGaAs are reported.

Keywords:

spectroscopic ellipsometry
Optoelectronics
Ellipsometry
Semiconductor
Molecular beam epitaxy
Reflectivity
Solid-state physics
Spectroscopy
Materials science
In situ

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