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20304 純粋の溶存酸素量と導電率がCu腐食に与える影響の定量的評価(OS3 機械工学が支援する微細加工技術(半導体・MEMS・NEMS)(2),オーガナイズドセッション)
20304 純粋の溶存酸素量と導電率がCu腐食に与える影響の定量的評価(OS3 機械工学が支援する微細加工技術(半導体・MEMS・NEMS)(2),オーガナイズドセッション)
2010
syouhei sima
katuhiko tokusige
yutaka wada
mei fukunaga
gaku tuzimura
Keywords:
Corrosion
Nanoelectromechanical systems
Oxygen saturation
Quartz crystal microbalance
Conductivity
Copper
Materials science
Microelectromechanical systems
Inorganic chemistry
Nanotechnology
Correction
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