Highly damage resistant cavity optics for excimer lasers

This paper reviews the experimental works dedicated to the development of mirrors and antireflection coatings for the UV spectrum range carried out in the Quantum Radiophysics Division of P.N. Lebedev Physical Institute, Russian Academy of Sciences. The methods of obtaining the single-layer and multilayer optical coatings are given. The effect of the optical coating construction as well as various technological factors of coating process on damage threshold and chemical stability of mirrors is investigated.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.