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Design, Ion beam fabrication and test of integrated optical elements
Design, Ion beam fabrication and test of integrated optical elements
2018
I. Bányász
S. Pelli
Gualtiero Nunzi-Conti
G. C. Righini
S. Berneschi
E. Szilágyi
Attila Németh
M. Fried
P. Petrik
Emil Agocs
Benjamin Kalas
Z. Zolnai
N.Q. Khánh
I. Rajta
G.U.L. Nagy
V. Havránek
V. Vosecek
M. Veres
L. Himics
Keywords:
Ion implantation
Ion beam
Diffraction grating
Analytical chemistry
Materials science
micro raman spectroscopy
spectroscopic ellipsometry
integrated optics
Fabrication
Optoelectronics
Correction
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