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Interpretation and Modeling of Laser-Induced Backside Wet Etching Procedure
Interpretation and Modeling of Laser-Induced Backside Wet Etching Procedure
2010
Csaba Vass
J. Budai
Z. Schay
B. Hopp
Keywords:
Optics
Dry etching
Reactive-ion etching
Laser
Etching (microfabrication)
Physics
carbon contamination
Optoelectronics
Correction
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