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Formation of light-emitting Si:Er layers by ion implantation and pulsed annealing
Formation of light-emitting Si:Er layers by ion implantation and pulsed annealing
2007
R. I. Batalov
R. M. Bayazitov
D. I. Kryzhkov
Peter I. Gaiduk
G.D. Ivlev
Keywords:
Materials science
Ion implantation
Annealing (metallurgy)
Optoelectronics
Correction
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