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Atom Probe Tomographic Study on Implanted Deuterium in Al2O3/HfxSi1-xO2/SiO2 Stacks
Atom Probe Tomographic Study on Implanted Deuterium in Al2O3/HfxSi1-xO2/SiO2 Stacks
2017
Yuan Tu
Bin Han
Yasuo Shimizu
Yorinobu Kunimune
Yutaka Shimada
Masao Inoue
Koji Inoue
Shinji Nagata
Yasuyoshi Nagai
Keywords:
Atom probe
Deuterium
Nanotechnology
Stack (abstract data type)
Engineering
Analytical chemistry
High-κ dielectric
Materials science
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