Manufacturability evaluation of layer model for surface micro-machined MEMS

A systematic method of evaluating and improving layer model was proposed to avoid manufacturability problems of the layer model generated from the solid model for surface micro-machined microelectromechanical systems(MEMS).The manufacturability of the layer model was analyzed,which involved the releasability of sacrificial material,the contact of all layers,the manufacturability of etching,etc.The evaluation algorithm was also developed based on the analysis.Suggestions were redesigned and generated based on evaluation results,which were presented to the designer to refine the initial design.The algorithm was implemented and some test results were given.