Chemical mechanical polishing erosion inhibitor, a chemical mechanical polishing slurry and chemical mechanical polishing method

The present invention has a molecular weight compound having four or more is and hydroxyl 100,000 or less (a), and amino group compound having four or more contain (b), said compound (a) with said compound (b ) mass ratio of (the compound (a) / the compound (b)) is to provide a chemical mechanical polishing erosion inhibitor is 0.10 to 500.