Application of diffractive optical elements in laser metrology

Laser metrology often requires the precision forming of a probe laser beam with necessary wavefront shape or given intensity distribution. This problem is solved optimally by application of diffractive optical elements (DOE). In the IA&E SB RAS a circular laser writing system (CLWS) was created for high precision DOE fabrication. This system allows to fabricate arbitrary DOEs with minimum feature sizes below 0.6 ?m and the radial position accuracy of about 0.1 ?m over 300 mm substrates. The investigations carried out have confirmed promising prospects of application of high precision DOEs fabricated with the help of CLWS for solving various metrological problems.