Challenging the Limits of Thin Film Process Control

Introduction The previous article (2008 Fall Bulletin) elaborated on many enhanced performance coatings entering the market, such as electrochromic, temperable and bendable coatings, and “super-selective” triple low-E coatings. One common characteristic of these products is the dependence of their performance on precise thickness and uniformity control of multiple layer films across areas up to 20 m2. Coating sensitivity now requires thickness control in the range of + 1% to achieve reproducible performance.