A Practical Microgripper By Fine Alignment, Eutectic Bonding And Sma Actuation

A silicon microgripper with a large gripping force, a relatively rigid structural body, and flexibility in functional design is presented. The actuation is generated by Ni-Ti-Cu shape memory alloy (SMA) films and the stress induced can deflect each side of the microgripper up to 55 {mu}m for a total gripping motion of 110 {mu}m. When fully open, the force exerted by the film corresponds to a 40 mN gripping force on the tip of the gripper.