Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics

A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3 mm2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1 ms is predicted.