Surface concentrations of indium, phosphorus and oxygen in indium phosphide single crystals after exposure to gamble solution

The surface of indium phosphide single crystals exposed to synthetic lung fluid (Gamble solution) has been investigated. An oxygen depth profile, obtained by employing the 3.034-MeV resonance in the elastic scattering of α particles from 16 O, detected oxygen at maximum concentrations of 24% in a layer 1000 A thick. O:In and O:P ratios were found to increase with prolonged exposure time as determined by angle-resolved XPS, although binding energies and peak fwhm's remained relatively constant