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Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics
Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics
2019
A. D. Barinov
A. I. Popov
A.A. Makarov
Keywords:
Diamond
Computer science
Nanoelectronics
Carbon film
Silicon
control methods
Nanotechnology
Correction
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