Simulation of A Low Loss Optical Modulator for Fabrication in Simox Material

1993 
A novel phase modulator has been designed and analysed, assuming fabrication in a silicon-on-insulator material such as SIMOX. The proposed modulator is based upon a transverse p-i-n structure, utilising the plasma dispersion effect to produce the desired refractive index change in an optical rib waveguide. The device has been studied using the MEDICI two dimensional device simulation package to optimise the injected carrier interaction with the propagating optical mode. Whilst the device is designed to support a single optical mode, it measures several micrometers in cross sectional dimensions, thereby simplifying fabrication and allowing efficient coupling to other single mode devices such as optical fibers. Furthermore the device has an extremely high figure of merit, predicting over 200 degrees of induced phase shift per volt per mm. This implies a short active length together with a low power requirement.
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