Structure Evolution of NdF3 Optical Thin Films

The structure evolution characteristics of NdF 3 thin films has been analysed concerning texture and grain morphology. The structure could be classified according to the structure zone models, and the growth mode could be related to zone T and zone II. Contamination of the films by residual gases was found to inhibit the migration of grain boundaries and therefore, zone II does not appear even at high substrate temperatures in contaminated films. Stratification by MgF 2 interlayers may also result in a decrease of grain size and a smaller surface roughness. The correlation between deposition conditions, stratification, growth mode and optical properties is discussed.