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Long-range effect of ion bombardment on the state of nitrogen and oxygen implanted into silicon
Long-range effect of ion bombardment on the state of nitrogen and oxygen implanted into silicon
1998
V. V. Karzanov
K. A. Markov
D. V. Masterov
Keywords:
Oxygen
Ion implantation
Inorganic chemistry
Nitrogen
Wafer
Ion
Chemistry
Infrared spectroscopy
Silicon
Optical microscope
Correction
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