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Self-Aligned Four-Terminal Metal Double-Gate LT Ni-SPC Poly-Si TFT with High-k Gate Stack
Self-Aligned Four-Terminal Metal Double-Gate LT Ni-SPC Poly-Si TFT with High-k Gate Stack
2016
Nibe Syota
Ohsawa Hiroki
Hara Akito
Keywords:
Thin-film transistor
High-κ dielectric
Materials science
Metal-induced crystallization
Electronic engineering
Inorganic chemistry
Metal
double gate
Optoelectronics
gate stack
Correction
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