SU 8 used as optical waveguide in integrated optical microsensor for biological applications
2005
We present preliminary experiments for an integrated optical sensor based on a Mach-Zehnder interferometer for
biological applications. The sensor is sensitive to refractive index change produced by the presence of a biological
species in the cladding of the optical waveguide. A "window" can be patterned in the upper cladding, so that the
evanescent wave can be in direct contact with the environmental (the sensitive layer). We investigated as optical
waveguides a new material, SU-8, a negative photoresist well known from the development of 3D micromachmed
structures. We structured, by photolithographic techniques, rib and channel optical waveguides. We studied the influence
of the silicon substrate on propagation losses and the possibility to use these losses for the selective attenuation of the
higher order modes on the vertical direction. As biological materials we experimented collagen, which is a bio-polymer
which can bind different enzymes or antibodies.
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