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Chemical Vapor Deposition Polymerization
Chemical Vapor Deposition Polymerization
2004
Jeffrey Bernard Fortin
Toh-Ming Lu
Keywords:
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Plasma processing
Combustion chemical vapor deposition
Deposition (phase transition)
Plasma-enhanced chemical vapor deposition
Polymerization
Materials science
Inorganic chemistry
Chemical engineering
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