Electrochemical processing method of high depth-to-width ratio micro metallic bundle pillar structure and special-purpose tool

The invention discloses an electrochemical method and a special tool of processing high depth-to-width ratio micro metallic pile cluster, belonging to the technical field of manufacturing technique and device to process high depth-to-width ratio micro metallic structure. The method adopts a metallic screen plate as a special tool, wherein, the special tool and a workpiece anode move in opposite directions under the control of an industrial control computer to carry out electrolytic machining. The invention is characterized in that an insulated layer is coated on both the lateral wall of a hole group and the back of the screen plate of the metal screen plate, which is used as a special tool, to shield the electric field of the lateral wall and the back of the hole group of the metallic screen plate and the surfaces of the newly processed hole group, so as to protect the structure of the newly processed pile clusters from corrosion. The invention is capable of manufacturing micro metallic pile clusters of (theoretically) unlimited depth-to-width ratio with high efficiency and low cost.