Influence of substrate type on structure of C-Pd thin films

C-Pd films were obtained by a two steps’ PVD/CVD method (Physical Vapor Deposition/Chemical Vapor Deposition). Investigations of Pd nanograins structure and carbon matrix structure were performed. Many types of substrates (Si, Si covered with DLC layer, Al2O3 plate and AAO membrane) with various developing specific surface area (SSA) were applied and the influence on this surface on obtained films C-Pd was studied. We present the results of Scanning Electron Microscopy (SEM) studies with SE (Secondary Electrons) and LABE (Low Angle Backscattered Electrons) modes. Depending on the substrate type it was possible to obtain many different films and structures with various structural features.