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In-situ wafer curvature measurement and strain control of AlInN/GaN distributed Bragg reflectors
In-situ wafer curvature measurement and strain control of AlInN/GaN distributed Bragg reflectors
2020
Kei Hiraiwa
Wataru Muranaga
Sho Iwayama
Tetsuya Takeuchi
Satoshi Kamiyama
Motoaki Iwaya
Isamu Akasaki
Keywords:
Strain (chemistry)
In situ
Optics
Chemistry
wafer curvature
Correction
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