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Laser Ablation of PECVD Oxide for Structuring of Back-Junction Interdigitated Silicon Solar Cells
Laser Ablation of PECVD Oxide for Structuring of Back-Junction Interdigitated Silicon Solar Cells
2009
S.E. Foss
K. Mangersnes
Keywords:
Oxide
Monocrystalline silicon
Laser ablation
Hybrid silicon laser
Plasma-enhanced chemical vapor deposition
Optoelectronics
Materials science
Silicon
laser processing
Structuring
Correction
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