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Metal Induced Lateral Crystallization of PECVD a-Si and Its Impact on TFT Performance
Metal Induced Lateral Crystallization of PECVD a-Si and Its Impact on TFT Performance
2009
Kanoh Shintaro
Nagata Sho
Nakagawa Gou
Asano Tanemasa
Keywords:
Thin-film transistor
Polycrystalline silicon
Crystallization
Nanotechnology
Carbon nanotube
Plasma-enhanced chemical vapor deposition
Materials science
Inorganic chemistry
Metal
Optoelectronics
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