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Growth of GaN thin films by chemical vapor deposition using Ga vapor
Growth of GaN thin films by chemical vapor deposition using Ga vapor
2017
Fukasawa Kensuke
Nagase Tsuyoshi
Masuda Yuichirou
Kouno Tetsuya
Kominami Hiroko
kazuhiko Hara
Keywords:
Thin film
Ion plating
Hybrid physical-chemical vapor deposition
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma processing
Deposition (phase transition)
Pulsed laser deposition
Inorganic chemistry
Materials science
Chemical engineering
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