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A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology
2016
Konishi Toshifumi
Safu Teruaki
Machida Katsuyuki
Yamane Daisuke
Sone Masato
Masu Kazuya
Toshiyoshi Hiroshi
Keywords:
Control engineering
Inertial frame of reference
Proof mass
Microelectromechanical systems
Engineering
Metal
Search engine
Mechanical engineering
multi layer
Chemical substance
Science, technology and society
damping constant
Imagination
Correction
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