A Physical-basedMethodforParameter Extraction ofOn-Chip SpiralInductor

Inthiswork,a newcomprehensive methodto extract theinductor equivalent modelparameters isdeveloped. Frequency-dependent expressions forthemodelcomponents are obtained fromthesimplification ofthe2r-model Y-parameter equations. Byanalyzing theinfluence ofthecomponents value ontheinductor quality factor andinductance, thefrequencies at whichtheparameters willbe evaluated areselected. The methodhasbeenvalidated bycomparison withmeasurements of inductors fabricated ina0.35pmprocess. Results showagood agreement overabroad-band frequency upto10GHz. IndexTerms-RFIC,on-chip inductor, equivalent-circuit model, parameter extraction.