A novel deep-UV polymer for integrated photonics: from waveguides structures to taper-waveguides coupled to cascade of multistage resonators used as thermal sensors
2014
An overview of current research on integrated photonics based on the new UV210 phot-oresist is given. We report the overall design, fabrication and characterization of waveguides structures, multistage microresonators and their potential as thermal sensors.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
8
References
0
Citations
NaN
KQI