Phthalocyanines ultrathin alternating layer film on silicon, prepared by molecular beam deposition

Abstract Copper-phthalocyanine (CuPc) and magnesium-phthalocyanine (MgPc) were alternatively deposited on silicon substrates by organic molecular beam deposition. The thickness of each layer was varied in the range 3.0–10.0 nm. The layered structure of the film was confirmed by secondary ion mass spectrometry depth profiling and cross-sectional observations with a transmission electron microscope. The molecular orientation within a film was estimated by Fourier transform IR spectroscopy. The measurements suggested that the planar molecules of CuPc and MgPc were inclined at an angle of 22° with respect to the substrate surface.