Preparation of high Tc YBa2Cu3O7-x thin films

The various deposition processes for preparing high-T superconducting thin flints are compared. The focus is on both the key film properties produced by each technique as well as the advantages and disadvantages of the specific deposition process. Emphasis is placed on the issues relating to film manufacturability and consequently centers on the YBaCu3O7 superconductor. Innovative solutions allowing in-situ fabrication of thin films are also covered along with the leading post-anneal processes. The specific techniques examined include sputtering (single-target and multi-target), electron-beam co-evaporation, MBE, laser ablation, ion-beam deposition, and CVD.