Control of a 45-cm long x-ray deformable mirror with either external or internal metrology

Our 45-cm long x-ray deformable mirror has 45 actuators along the tangential axis, along with one strain gauge per actuator and eight temperature sensors. We discuss the detailed calibration of the mirror's figure response to voltage (fourth-order) and the strain gauges' response to figure changes (linear). The mirror's cylinder shape changes with temperature, which can be tracked with the temperature sensors. We present initial results of measuring figure change with the strain gauges, which works very well for large changes (> 10 nm peak-to- valley), but is noisy with a single strain reading for small changes (5 nm peak-to-valley).