Ellipsometric Data Selection for More Accurate Optical Characterization of Thin Film Material

Suyong Wu,Yun Huang,Kaiyong Yang,Zhongqi Tan,Tianliang Qu,Xingwu Long

Ellipsometric Data Selection for More Accurate Optical Characterization of Thin Film Material

2013

Suyong Wu
Yun Huang
Kaiyong Yang
Zhongqi Tan
Tianliang Qu
Xingwu Long

A novel strategy of choosing ellipsometric data is presented for more accurate optical characterization of thin film materials based on partial derivatives analysis and selection.

Keywords:

Thin film
Materials science
Analytical chemistry
spectral properties
data selection
Computer simulation
Optoelectronics
Refractive index
Optical depth
Optical coating

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations