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Virtual de-embedding study for the accurate extraction of Fin FET gate resistance
Virtual de-embedding study for the accurate extraction of Fin FET gate resistance
2014
Shireen Warnock
R. Groves
Hongmei Li
Richard A. Wachnik
Pooja M. Kotecha
Sungjae Lee
Ning Lu
Paul M. Solomon
Keith A. Jenkins
Keywords:
Metal gate
Electronic engineering
Fin
Embedding
Engineering
Electrical engineering
gate resistance
Computer science
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