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Feasibility study of micromachining of silicon wafer with excimer laser using COMSOL multiphysics
Feasibility study of micromachining of silicon wafer with excimer laser using COMSOL multiphysics
2016
Gaganpreet Singh
Shashank Sharma
Kartar Singh
J. Ramkumar
Keywords:
Excimer laser
Wafer
Surface micromachining
Analytical chemistry
Materials science
Multiphysics
Nanotechnology
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