Old Web
English
Sign In
Acemap
>
Paper
>
Influence of in-situ Doped Boron on the Surface Roughening of SiGe:B Films
Influence of in-situ Doped Boron on the Surface Roughening of SiGe:B Films
2008
Ryutaro Tsuchida
Shinji Mori
Tsutomu Sato
Naotaka Uchitomi
Ichiro Mizushima
Keywords:
Boron
Doping
Ceramic materials
Inorganic chemistry
Materials science
Chemical engineering
surface roughening
In situ
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]