48.2: The Chemical Durability of EAGLE XG™ in LCD Dry Etch Processes

This work compared the chemical durability of EAGLE XG™, EAGLE2000™ and Code 1737 glasses in typical TFT dry etch processes. Active, dielectric, and metal films were etched with a resist mask. Glass surfaces were evaluated by dark field microscopy, SEM/EDX, and AFM. The results show dry etch durability is comparable for all three compositions.