Semiconductor processing device and degas chamber and heating assembly thereof

The invention discloses a semiconductor processing device and a degas chamber and a heating assembly thereof. The heating assembly comprises a light condensation cover and multiple heating bulbs. The light condensation cover is provided with a plane part which is arranged at the center and an arc-shaped cover edge part which is connected with the circumferential edge of the plane part. The multiple heating bulbs are arranged on the internal surface of the plane part. According to the heating assembly of the embodiment of the invention, light of the multiple heating bulbs can be reflected via the plane part and the arc-shaped cover edge part. With the structure, heating uniformity of the heating assembly is great, and energy emitted by the heating bulbs is reflected into the degas chamber in full effect so that energy of light rays arriving at a substrate in the degas chamber is increased, temperature of the substrate reaches technology temperature more rapidly and enhancement of production efficiency is facilitated.