Time-Division Multiplexing of Iterated Holograms for Lithography on 3D Surfaces

Joshua J. Cowling,Jose Juan De Jesus Toriz-Garcia,Alan Purvis,Richard McWilliam,Gavin Williams,Florian B. Soulard,N. Luke Seed,Peter A. Ivey

Time-Division Multiplexing of Iterated Holograms for Lithography on 3D Surfaces

2012

Joshua J. Cowling
Jose Juan De Jesus Toriz-Garcia
Alan Purvis
Richard McWilliam
Gavin Williams
Florian B. Soulard
N. Luke Seed
Peter A. Ivey

A 3D substrate is lithographically patterned using a set of holograms generated by a multi-plane iterative algorithm. The substrate is exposed to multiple phase-only holograms over the duration of an exposure, thus averaging noise.

Keywords:

Time-division multiplexing
Lithography
Holography
Image quality
Iterated function
Iterative method
Electronic engineering
Materials science
Optics
Optoelectronics
3d surfaces
Multiplexing

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