Lighting system for microlithography

Honeycomb condenser with at least three optical elements (R1, R2, R3) with a plurality of first, second and third grid elements (21, 22, 23), the second raster elements (22) the first raster elements (21) with an imaging scale (β) in a plane (P) mapping, wherein the size of the illuminated area (d ') of the second illumination channel in the plane (P) is less than or equal to the size (d) of the illuminated region, and wherein immediately before the first raster elements (21), a transfer optics the third raster elements (23) is arranged downstream and the third raster elements (23) all the illuminated areas of the planes (P) by the transfer optics superposed in a plane (F) depict.