Large-area atmosphere plasma even discharge electrode
2013
The invention discloses a large-area atmosphere plasma even discharge electrode and belongs to the field of optical processing. The large-area atmosphere plasma even discharge electrode aims to solve the problems that an alternating current generated by discharging of an existing large-area atmosphere plasma has the skin effect that the current density is increased when the alternating current approaches the edge of the electrode, uneven discharging of the large-area electrode is caused, and precision and efficiency of a processing technology of the atmosphere plasma are seriously influenced. The large-area atmosphere plasma uneven discharge electrode is flat-sheet-shaped. A plurality of protruding microelectrodes are arranged on the discharging surface of the large-area atmosphere plasma even discharge electrode, the shapes and the sizes of all protruding microelectrodes are identical, the distances between each protruding microelectrode and adjacent protruding microelectrode are identical, and the distances between the discharging surfaces of each protruding microelectrode and the processed working surfaces which are opposite to the protruding microelectrodes are equal. The large-area atmosphere plasma even discharge electrode can achieve large-area even discharging of the atmosphere plasma, avoids the phenomenon of uneven discharging caused by the skin effect and the marginal discharge effect when continuous surface electrodes motivate the plasma in an atmospheric environment, and therefore the processing precision and the processing efficiency of the atmosphere plasma can be effectively improved.
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